A MEMS capacitive gyroscope with improved reliability

X. J. Liang, S. Q. Gao

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.

源语言英语
主期刊名Advances in Materials Manufacturing Science and Technology XIII
主期刊副标题Modern Design Theory and Methodology, MEMS and Nanotechnology, Material Science and Technology in Manufacturing
出版商Trans Tech Publications Ltd.
341-346
页数6
ISBN(印刷版)0878493123, 9780878493128
DOI
出版状态已出版 - 2009
活动13th International Manufacturing Conference in China, IMCC2009 - Dalian, 中国
期限: 21 9月 200923 9月 2009

出版系列

姓名Materials Science Forum
628 629
ISSN(印刷版)0255-5476
ISSN(电子版)1662-9752

会议

会议13th International Manufacturing Conference in China, IMCC2009
国家/地区中国
Dalian
时期21/09/0923/09/09

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引用此

Liang, X. J., & Gao, S. Q. (2009). A MEMS capacitive gyroscope with improved reliability. 在 Advances in Materials Manufacturing Science and Technology XIII: Modern Design Theory and Methodology, MEMS and Nanotechnology, Material Science and Technology in Manufacturing (页码 341-346). (Materials Science Forum; 卷 628 629). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/MSF.628-629.341