摘要
The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.
源语言 | 英语 |
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主期刊名 | Advances in Materials Manufacturing Science and Technology XIII |
主期刊副标题 | Modern Design Theory and Methodology, MEMS and Nanotechnology, Material Science and Technology in Manufacturing |
出版商 | Trans Tech Publications Ltd. |
页 | 341-346 |
页数 | 6 |
ISBN(印刷版) | 0878493123, 9780878493128 |
DOI | |
出版状态 | 已出版 - 2009 |
活动 | 13th International Manufacturing Conference in China, IMCC2009 - Dalian, 中国 期限: 21 9月 2009 → 23 9月 2009 |
出版系列
姓名 | Materials Science Forum |
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卷 | 628 629 |
ISSN(印刷版) | 0255-5476 |
ISSN(电子版) | 1662-9752 |
会议
会议 | 13th International Manufacturing Conference in China, IMCC2009 |
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国家/地区 | 中国 |
市 | Dalian |
时期 | 21/09/09 → 23/09/09 |
指纹
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Liang, X. J., & Gao, S. Q. (2009). A MEMS capacitive gyroscope with improved reliability. 在 Advances in Materials Manufacturing Science and Technology XIII: Modern Design Theory and Methodology, MEMS and Nanotechnology, Material Science and Technology in Manufacturing (页码 341-346). (Materials Science Forum; 卷 628 629). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/MSF.628-629.341