A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

Fang Chen; Huikai Xie; Gary K. Fedder

doi:10.1109/20.951007

A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

Fang Chen^*, Huikai Xie, Gary K. Fedder

^*此作品的通讯作者

Carnegie Mellon University

科研成果: 期刊稿件 › 会议文章 › 同行评审

7 引用（Scopus）

摘要

A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

源语言	英语
页（从-至）	1915-1918
页数	4
期刊	IEEE Transactions on Magnetics
卷	37
期	4 I
DOI	https://doi.org/10.1109/20.951007
出版状态	已出版 - 7月 2001
已对外发布	是
活动	8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, 美国期限: 7 1月 2001 → 11 1月 2001

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title = "A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control",

abstract = "A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.",

keywords = "Fly height, MEMS electrostatic actuator, Micro-fabrication, Slider",

author = "Fang Chen and Huikai Xie and Fedder, {Gary K.}",

year = "2001",

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AU - Chen, Fang

AU - Xie, Huikai

AU - Fedder, Gary K.

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N2 - A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

AB - A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a slider with a modified CMOS-MEMS process. It has an extremely small size, light weight and a very simple structure. The head is suspended and actuated up and down by the actuator during recording process to maintain a constant fly height. A desired range and precision of actuation is achieved under control voltages of less than 30 V. A mechanical resonant frequency of over 100 kHz is obtained.

KW - Fly height

KW - MEMS electrostatic actuator

KW - Micro-fabrication

KW - Slider

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A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control

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