TY - GEN
T1 - A low temperature-dependence gain-boosting front-end amplifier for CMOS-MEMS gyroscopes
AU - Sun, Hongzhi
AU - Jia, Kemiao
AU - Liu, Xuesong
AU - Yan, Guizhen
AU - Hsu, Yu Wen
AU - Xie, Huikai
PY - 2010
Y1 - 2010
N2 - This paper describes a novel differential difference amplifier (DDA) with boosted gain, low temperature dependence, low noise and low power consumption for applications in monolithic CMOS-MEMS gyroscopes. The employed capacitive feedback achieves a 4fF equivalent transcapacitance with a 0.01%/°C temperature variation. The DDA-based interface circuits have been integrated with a z-axis gyroscope on a foundry CMOS chip. The DDA achieves a 24 dB gain and a 150 nV/√Hz input-referred noise at 2 kHz, with a power consumption of 0.75 mW. The gyroscope is fabricated with a post-CMOS bulk micromachining process and it achieves a sensitivity of 0.3mV/°/s and a noise floor 0.2°/s/√Hz.
AB - This paper describes a novel differential difference amplifier (DDA) with boosted gain, low temperature dependence, low noise and low power consumption for applications in monolithic CMOS-MEMS gyroscopes. The employed capacitive feedback achieves a 4fF equivalent transcapacitance with a 0.01%/°C temperature variation. The DDA-based interface circuits have been integrated with a z-axis gyroscope on a foundry CMOS chip. The DDA achieves a 24 dB gain and a 150 nV/√Hz input-referred noise at 2 kHz, with a power consumption of 0.75 mW. The gyroscope is fabricated with a post-CMOS bulk micromachining process and it achieves a sensitivity of 0.3mV/°/s and a noise floor 0.2°/s/√Hz.
UR - http://www.scopus.com/inward/record.url?scp=79951907957&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690797
DO - 10.1109/ICSENS.2010.5690797
M3 - Conference contribution
AN - SCOPUS:79951907957
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 1029
EP - 1032
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -