@inproceedings{56f7ca5415714f3db982b9c46fce3296,
title = "A large rotation angle electrothermal micromirror with integrated platinum heater",
abstract = "We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124° has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz.",
author = "Lei Wu and Huikai Xie",
year = "2006",
language = "English",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
pages = "106--107",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}