@inproceedings{38e58e9ba6d64718879a34213b36f8ed,
title = "A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR",
abstract = "Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-Aperture, 2-Axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm2 and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.",
keywords = "LiDAR, MEMS micromirror, electrothermal actuation, large aperture",
author = "Dingkang Wang and Connor Watkins and Medini Aradhya and Sanjeev Koppal and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 ; Conference date: 28-07-2019 Through 01-08-2019",
year = "2019",
month = jul,
doi = "10.1109/OMN.2019.8925039",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
pages = "180--181",
booktitle = "OMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings",
address = "United States",
}