A grating interferometer based high-sensitivity acoustic sensor packaged with optoelectronic readout module

Mengying Zhang, Zhenjun Ma, Ran Gao, Zhi Mei Qi*, Xingdong Liang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

An acoustic sensor based on grating interferometer has been developed. The interference structure was made of glass and packaged with the optoelectronic readout module. The acoustic sensor achieved high-sensitivity and high-quality response.

源语言英语
主期刊名Optical Sensors, Sensors 2019
出版商Optica Publishing Group (formerly OSA)
ISBN(印刷版)9781943580613
DOI
出版状态已出版 - 2019
已对外发布
活动Optical Sensors, Sensors 2019 - San Jose, 美国
期限: 25 6月 201927 6月 2019

出版系列

姓名Optics InfoBase Conference Papers
Part F166-Sensors 2019
ISSN(电子版)2162-2701

会议

会议Optical Sensors, Sensors 2019
国家/地区美国
San Jose
时期25/06/1927/06/19

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