A 2D electrothermal micromirror with feedback based on Hall-effect of piezoresistive sensors

Yue Tang, Jianhua Li^*, Lixin Xu, Huikai Xie

^*此作品的通讯作者

Beijing Institute of Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

Engineering