@inproceedings{bd0431b2267d457794c87cf763f71dcc,
title = "A 2-axis MEMS scanning micromirror with a 45° auto-positioning mechanism for endoscopic probe",
abstract = "In this paper, we report a novel 2-axis electrothermal MEMS micro-scanner with an initial tilt at 45° out of its support plane. A new type of mechanical stopper is designed to hold the structure in the initial oblique bending position, which enables a cross axis decoupling. The micro-scanner is a key component of a fully integrated endoscopic imaging probe for 3D Swept Source (SS) Optical Coherence Tomography (OCT) imaging system and is developed with the objective of proposing an assembly adapted for industrial manufacturing.",
keywords = "3D optical micro-scanner, MEMS, MOEMS fabrication, OCT, dual-reflective mirror, electrothermal, endoscopy, mechanical stopper",
author = "Tanguy, {Quentin A.A.} and Sylwester Bargiel and Can Duan and Wei Wang and Przemys{\l}aw Struk and Huikai Xie and Philippe Lutz and Christophe Gorecki",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994450",
language = "English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1947--1950",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}