3-D confocal laser scanning microscopy based on a full-MEMS scanning system

Lin Liu; Huikai Xie

doi:10.1109/LPT.2013.2267794

3-D confocal laser scanning microscopy based on a full-MEMS scanning system

Lin Liu, Huikai Xie

University of Florida

科研成果: 期刊稿件 › 文章 › 同行评审

11 引用（Scopus）

摘要

We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.

源语言	英语
文章编号	6544566
页（从-至）	1478-1480
页数	3
期刊	IEEE Photonics Technology Letters
卷	25
期	15
DOI	https://doi.org/10.1109/LPT.2013.2267794
出版状态	已出版 - 2013
已对外发布	是

访问文件

10.1109/LPT.2013.2267794

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{2086a299a47e476583b1268b0aa2ee60,

title = "3-D confocal laser scanning microscopy based on a full-MEMS scanning system",

abstract = "We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.",

keywords = "3-D scan, MEMS lens, MEMS mirror, confocal microscopy, thermal actuation",

author = "Lin Liu and Huikai Xie",

year = "2013",

doi = "10.1109/LPT.2013.2267794",

language = "English",

volume = "25",

pages = "1478--1480",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "15",

}

TY - JOUR

T1 - 3-D confocal laser scanning microscopy based on a full-MEMS scanning system

AU - Liu, Lin

AU - Xie, Huikai

PY - 2013

Y1 - 2013

N2 - We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.

AB - We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μ m at only 3.2 V. The two-dimensional MEMS mirror can achieve 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μ m, respectively.

KW - 3-D scan

KW - MEMS lens

KW - MEMS mirror

KW - confocal microscopy

KW - thermal actuation

UR - http://www.scopus.com/inward/record.url?scp=84880533556&partnerID=8YFLogxK

U2 - 10.1109/LPT.2013.2267794

DO - 10.1109/LPT.2013.2267794

M3 - Article

AN - SCOPUS:84880533556

SN - 1041-1135

VL - 25

SP - 1478

EP - 1480

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 15

M1 - 6544566

ER -

3-D confocal laser scanning microscopy based on a full-MEMS scanning system

摘要

访问文件

其它文件与链接

指纹

引用此