摘要
Based on optical element’s high precision in-situ measurement requirements, this paper carries out the sensitive factor simulation analysis, studies the influence of systematic structural errors and temperature errors on the measurement results, and designs and builds an in-situ measurement device to carry out measurement experiments of system temperature change, system repeatability and system stability. The results show that the simulation detection model can be used for plane/spherical/aspherical/free surface, the influence on the measurement results is mainly reflected in the low frequency error, the high frequency error is relatively small, the maximum PV value of the measurement surface shape error does not exceed 68nm (about λ/10), and the maximum RMS value does not exceed 15 nm (about λ/40).
| 投稿的翻译标题 | Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry |
|---|---|
| 源语言 | 繁体中文 |
| 文章编号 | 091002 |
| 期刊 | Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams |
| 卷 | 35 |
| 期 | 9 |
| DOI | |
| 出版状态 | 已出版 - 15 9月 2023 |
关键词
- error analysis
- in-situ measurement
- optical element
- shape measurement
- simulation model