Abstract
We report a fast-response humidity sensor fabricated using vertically aligned carbon nanotubes (CNT). The tips of CNT are intersected to form the resistive active region of the sensor, and the stem of the vertical CNT are aligned to create a clear path for moisture flow. The sensor showed a linear resistive response to relative humidity (RH) in a range of 10 % to 90 % and demonstrated the potential for real-time humidity monitoring. In transient characterizations, the sensor showed a response time of 1.9 s and a recovery time of 7.1 s to the RH of moisture flow that changes between 10 % RH and 90 % RH.
Original language | English |
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Title of host publication | 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 312-315 |
Number of pages | 4 |
ISBN (Electronic) | 9781728172309 |
DOIs | |
Publication status | Published - 27 Sept 2020 |
Externally published | Yes |
Event | 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 - Virtual, San Diego, United States Duration: 27 Sept 2020 → 30 Sept 2020 |
Publication series
Name | 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 |
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Conference
Conference | 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 |
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Country/Territory | United States |
City | Virtual, San Diego |
Period | 27/09/20 → 30/09/20 |
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Ma, Z. C., Wang, X. Y., & Zhang, L. N. (2020). Vertically Aligned Carbon Nanotubes for Fast Humidity Sensing. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020 (pp. 312-315). Article 9265614 (15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS50311.2020.9265614