Trench-filled cellular parylene electret for piezoelectric transducer

Yue Feng; Kei Hagiwara; Yoshinori Iguchi; Yuji Suzuki

doi:10.1063/1.4730952

Trench-filled cellular parylene electret for piezoelectric transducer

Yue Feng^*, Kei Hagiwara, Yoshinori Iguchi, Yuji Suzuki

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

57 Citations (Scopus)

Abstract

Cellular ferroelectrets with charged voids are promising for piezoelectric transducers, but the long-term stability or reproducibility due to the conventional stochastic fabrication and the corona charging methods is of concern. We microfabricated a high-density cellular piezoelectret with high-aspect-ratio polymer structures based on the trench-filled parylene technology. Vertical walls of the parylene structures are charged using soft x-ray to realize uniform artificial dipoles, of which moments could vary along with parylene structural deformation driven by the inertia of a seismic mass. Charge and voltage sensitivities of 9600 pC/N and 960 V/N with respect to the in-plane resonant oscillation have been achieved at 149 Hz, respectively.

Original language	English
Article number	262901
Journal	Applied Physics Letters
Volume	100
Issue number	26
DOIs	https://doi.org/10.1063/1.4730952
Publication status	Published - 25 Jun 2012
Externally published	Yes

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title = "Trench-filled cellular parylene electret for piezoelectric transducer",

abstract = "Cellular ferroelectrets with charged voids are promising for piezoelectric transducers, but the long-term stability or reproducibility due to the conventional stochastic fabrication and the corona charging methods is of concern. We microfabricated a high-density cellular piezoelectret with high-aspect-ratio polymer structures based on the trench-filled parylene technology. Vertical walls of the parylene structures are charged using soft x-ray to realize uniform artificial dipoles, of which moments could vary along with parylene structural deformation driven by the inertia of a seismic mass. Charge and voltage sensitivities of 9600 pC/N and 960 V/N with respect to the in-plane resonant oscillation have been achieved at 149 Hz, respectively.",

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AU - Feng, Yue

AU - Hagiwara, Kei

AU - Iguchi, Yoshinori

AU - Suzuki, Yuji

PY - 2012/6/25

Y1 - 2012/6/25

N2 - Cellular ferroelectrets with charged voids are promising for piezoelectric transducers, but the long-term stability or reproducibility due to the conventional stochastic fabrication and the corona charging methods is of concern. We microfabricated a high-density cellular piezoelectret with high-aspect-ratio polymer structures based on the trench-filled parylene technology. Vertical walls of the parylene structures are charged using soft x-ray to realize uniform artificial dipoles, of which moments could vary along with parylene structural deformation driven by the inertia of a seismic mass. Charge and voltage sensitivities of 9600 pC/N and 960 V/N with respect to the in-plane resonant oscillation have been achieved at 149 Hz, respectively.

AB - Cellular ferroelectrets with charged voids are promising for piezoelectric transducers, but the long-term stability or reproducibility due to the conventional stochastic fabrication and the corona charging methods is of concern. We microfabricated a high-density cellular piezoelectret with high-aspect-ratio polymer structures based on the trench-filled parylene technology. Vertical walls of the parylene structures are charged using soft x-ray to realize uniform artificial dipoles, of which moments could vary along with parylene structural deformation driven by the inertia of a seismic mass. Charge and voltage sensitivities of 9600 pC/N and 960 V/N with respect to the in-plane resonant oscillation have been achieved at 149 Hz, respectively.

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VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

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Trench-filled cellular parylene electret for piezoelectric transducer

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