The role of oxygen in the deposition of copper-calcium thin film as diffusion barrier for copper metallization

Zhinong Yu*, Ruihuang Ren, Jianshe Xue, Qi Yao, Zhengliang Li, Guanbao Hui, Wei Xue

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

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Material Science