The effect of micro-spring stiffness changes on the typical MEMS S&A device

Wang Dakui*, Lou Wenzhong, Xiong Yongjia, Wang Fufu, Liu Fangyi, Jin Xin, Lu Jun

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

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