@inproceedings{eaf976d6e8994008aa30139fd8cc98d2,
title = "Terahertz addressed spatial light modulator based on bi-material cantilevers array",
abstract = "This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate. The device works passively in an optical reflection mode with no-electronic components and can easily achieve high resolution. The coaxial visible light was spatially modulated to a Gaussian spot and cross shape with the measured modulation sensitivity of 0.18 deg/μW and the theoretical time constant of 7.8ms.",
keywords = "Terahertz, bi-material cantilever, metamaterial absorbers, spatial light modulator",
author = "Y. Wen and W. Ma and X. Yu and Y. Zhao and M. Liu and L. Dong",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181074",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "920--923",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
address = "United States",
}