Study on electron optical system for conical immersion lens

Ling Zhang; Liwei Zhou; Weiqi Jin; Erlun Fang

Study on electron optical system for conical immersion lens

Ling Zhang^*, Liwei Zhou, Weiqi Jin, Erlun Fang

^*Corresponding author for this work

Beijing University of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The computation of electrostatic field distribution for conical immersion lens was studied by boundary element method, and the electron trajectories under initial conditions were traced by a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical parameters such as cardinal points of lens were determined. The computation results are in good agreement with the values obtained by analytical asymptotical method.

Original language	English
Pages (from-to)	17-24
Number of pages	8
Journal	Tien Tzu Hsueh Pao/Acta Electronica Sinica
Volume	22
Issue number	6
Publication status	Published - Jun 1994
Externally published	Yes

Cite this

Zhang, L., Zhou, L., Jin, W., & Fang, E. (1994). Study on electron optical system for conical immersion lens. Tien Tzu Hsueh Pao/Acta Electronica Sinica, 22(6), 17-24.

@article{de793210029847f7a9dbd574a350b98d,

title = "Study on electron optical system for conical immersion lens",

abstract = "The computation of electrostatic field distribution for conical immersion lens was studied by boundary element method, and the electron trajectories under initial conditions were traced by a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical parameters such as cardinal points of lens were determined. The computation results are in good agreement with the values obtained by analytical asymptotical method.",

author = "Ling Zhang and Liwei Zhou and Weiqi Jin and Erlun Fang",

year = "1994",

month = jun,

language = "English",

volume = "22",

pages = "17--24",

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publisher = "Chinese Institute of Electronics",

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T1 - Study on electron optical system for conical immersion lens

AU - Zhang, Ling

AU - Zhou, Liwei

AU - Jin, Weiqi

AU - Fang, Erlun

PY - 1994/6

Y1 - 1994/6

N2 - The computation of electrostatic field distribution for conical immersion lens was studied by boundary element method, and the electron trajectories under initial conditions were traced by a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical parameters such as cardinal points of lens were determined. The computation results are in good agreement with the values obtained by analytical asymptotical method.

AB - The computation of electrostatic field distribution for conical immersion lens was studied by boundary element method, and the electron trajectories under initial conditions were traced by a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical parameters such as cardinal points of lens were determined. The computation results are in good agreement with the values obtained by analytical asymptotical method.

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M3 - Article

AN - SCOPUS:0028442783

SN - 0372-2112

VL - 22

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EP - 24

JO - Tien Tzu Hsueh Pao/Acta Electronica Sinica

JF - Tien Tzu Hsueh Pao/Acta Electronica Sinica

IS - 6

ER -

Study on electron optical system for conical immersion lens

Abstract

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