Study of a MEMS short-circuit fuse based on electro-thermal theory

Y. Zhao*, D. G. Li, W. Z. Lou, L. F. Zhang, J. H. Li, M. B. Fang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

With development of MEMS pyrotechnics devices such as semiconductor bridge/metal bridges, the energy required to fuze ignition becomes smaller and smaller. The energy needed for traditional short-circuit is far greater than MEMS pyrotechnics devices explosive, and takes a large space of fuze, which does not accord with the smaller trend in fuse volume and ignition energy. This paper describes a MEMS short-circuit fuse based on electro-thermal theory, it has similar volume with MEMS pyrotechnics devices, and the energy required is less than the traditional shorts fuse. This short-circuit fuse has well safety features, short action time, small volume, low cost, and it is suitable to be used in fuse or other areas .

Original languageEnglish
Title of host publicationMicro-Nano Technology XIII
PublisherTrans Tech Publications Ltd.
Pages277-283
Number of pages7
ISBN (Print)9783037853641
DOIs
Publication statusPublished - 2012
Event13th Annual Conference of Chinese Society of Micro-Nano Technology, CSMNT 2011 - Changchow, China
Duration: 28 Sept 201130 Sept 2011

Publication series

NameKey Engineering Materials
Volume503
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference13th Annual Conference of Chinese Society of Micro-Nano Technology, CSMNT 2011
Country/TerritoryChina
CityChangchow
Period28/09/1130/09/11

Keywords

  • Electro-thermal
  • Fuse
  • Igniter
  • MEMS

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