SiNx/SiOxNy叠层结构防潮能力的研究

Translated title of the contribution: Research on Moisture Barrier Property of SiNx/SiOxNy Stacks Structure

Haifei Xu*, Zhinong Yu, Jin Cheng, Xuyang Li, Yonghua Chen, Yan Li, Jianshe Xue

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Research on Moisture Barrier Property of SiNx/SiOxNy Stacks Structure'. Together they form a unique fingerprint.

Engineering

Chemical Engineering

Material Science