Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures

Kemiao Jia; Sean R. Samuelson; Huikai Xie

doi:10.1109/MEMSYS.2010.5442537

Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures

Kemiao Jia^*, Sean R. Samuelson, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Citations (Scopus)

Abstract

This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	180-183
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442537
Publication status	Published - 2010
Externally published	Yes
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	24/01/10 → 28/01/10

Access to Document

10.1109/MEMSYS.2010.5442537

Cite this

Jia, K., Samuelson, S. R., & Xie, H. (2010). Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 180-183). Article 5442537 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442537

Jia, Kemiao ; Samuelson, Sean R. ; Xie, Huikai. / Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. pp. 180-183 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{1a1e20bfd48a4c24bd9c77cae7a3a141,

title = "Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures",

abstract = "This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.",

author = "Kemiao Jia and Samuelson, {Sean R.} and Huikai Xie",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442537",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "180--183",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

Jia, K, Samuelson, SR & Xie, H 2010, Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442537, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 180-183, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442537

Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. / Jia, Kemiao; Samuelson, Sean R.; Xie, Huikai.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 180-183 5442537 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures

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AU - Samuelson, Sean R.

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PY - 2010

Y1 - 2010

N2 - This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.

AB - This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.

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U2 - 10.1109/MEMSYS.2010.5442537

DO - 10.1109/MEMSYS.2010.5442537

M3 - Conference contribution

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SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 180

EP - 183

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

Jia K, Samuelson SR, Xie H. Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 180-183. 5442537. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442537

Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures

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