Sensitivity optimization of resonator optical gyros based on optical resonator on Si substrate

Optical resonator with high quality factor Q values can be used as the core component of the resonator optic gyros, the miniaturization and integration of which can be achieved. These advantages develope the basis of current research in resonator gyroscope. In order to realize the integrated optical gyro with high sensitivity, on the basis of the production target of high Q value, large diameter cavity of integrated optical cavity fieldwiththedisc cavity core sensitive element is proposed for the application of resonant optical gyro. The correspondence between the Q value of disc cavity, DQ product (product of the diameter ofresonant cavity D and Qvalue), the sensitivity of optical resonator and the diameter of disc cavity can be analyzed by the theoretical calculation. In the experiment the disc cavity areprepared by the semiconductor process. Control the mask to achieve various diamond from 400 μm to 10 mm. The output transmission of disc cavity is collected through tapered fiber coupling, the result is that the Q factor is proportional to the change of the diameter of the disc cavity. When D=10 mm, the quality factor of the disc cavity is Q=1.2×10⁶, which can achieve the optimal gyro sensitivity of about 0.02°/s, and meet the requirements of business level application, which lays the foundation for research on a novel resonant optical chiplevel, integration of the micro resonator gyroscope.