@inproceedings{d5fab39babb645bd976fe6cc3900d4e3,
title = "Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35μM CMOS MEMS Technology",
abstract = "A Self-Heated Thermoresistive Flow (SHTF) sensor with the coated Parylene-C barrier layer, is reported by using a 0.35 μm 2P4M CMOS MEMS technology. For N2 gas flow, the SHTF sensor achieves the maximum normalized sensitivity (S∗ = Sc/P) of 171 mV/(m/s)/W, while keeps a low power consumption P < 18.3 mW for the input gas flow from 0 to 10 m/s. Moreover, the achieved accuracy of ±0.04 m/s within the linear range of 0∼2.5 m/s, enabling this robust flow sensor (more than 9 years of working time) for the indoor airflow measurement even in the moist condition. Therefore, this highly sensitive and long term reliable SHTF sensor with the coated Parylene-C layer will be a very promising flow sensing node for the smart Energy-efficient Buildings (EeBs).",
keywords = "CMOS MEMS, Long Term Reliability, Parylene-C Coating, SHTF Sensor",
author = "Wei Xu and Xiaoyi Wang and Basant Mousa and Maria Paszkiewicz and Lee, {Yi Kuen}",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
year = "2019",
month = jun,
day = "1",
doi = "10.1109/TRANSDUCERS.2019.8808379",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1913--1916",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
address = "United States",
}