Fingerprint
Dive into the research topics of 'Pushing the resolution of photolithography down to 15nm by surface plasmon interference'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Pushing the resolution of photolithography down to 15nm by surface plasmon interference
Jianjie Dong, Juan Liu*, Guoguo Kang, Jinghui Xie, Yongtian Wang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
63
Citations
(Scopus)