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Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications
A. Espinosa, K. Rabenorosoa*, C. Clévy, B. Komati, P. Lutz, X. Zhang, S. R. Samuelson, H. Xie
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
15
Citations
(Scopus)