Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

Lei Jin; Shiqiao Gao; Xiyang Zhang; Qinghe Wu

doi:10.3390/ma13102330

Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

Lei Jin, Shiqiao Gao^*, Xiyang Zhang, Qinghe Wu

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

Original language	English
Article number	2330
Journal	Materials
Volume	13
Issue number	10
DOIs	https://doi.org/10.3390/ma13102330
Publication status	Published - 1 May 2020

Keywords

Double-clamped
Electrodes pair
MEMS structure
Piezoelectric energy harvester
Width shapes

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10.3390/ma13102330

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title = "Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes",

abstract = "For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.",

keywords = "Double-clamped, Electrodes pair, MEMS structure, Piezoelectric energy harvester, Width shapes",

author = "Lei Jin and Shiqiao Gao and Xiyang Zhang and Qinghe Wu",

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AU - Jin, Lei

AU - Gao, Shiqiao

AU - Zhang, Xiyang

AU - Wu, Qinghe

PY - 2020/5/1

Y1 - 2020/5/1

N2 - For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

AB - For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.

KW - Double-clamped

KW - Electrodes pair

KW - MEMS structure

KW - Piezoelectric energy harvester

KW - Width shapes

UR - http://www.scopus.com/inward/record.url?scp=85085617974&partnerID=8YFLogxK

U2 - 10.3390/ma13102330

DO - 10.3390/ma13102330

M3 - Article

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SN - 1996-1944

VL - 13

JO - Materials

JF - Materials

IS - 10

M1 - 2330

ER -

Output of MEMS piezoelectric energy harvester of double-clamped beams with differentwidth shapes

Abstract

Keywords

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