On-chip χ⁽²⁾ microring optical parametric oscillator

Optical parametric oscillators (OPOs) have been widely used for decades as tunable, narrow-linewidth, and coherent light sources for reaching long wavelengths and are attractive for applications such as quantum random number generation and Ising machines. To date, waveguide-based OPOs have suffered from relatively high thresholds on the order of hundreds of milliwatts. With the advance in integrated photonic techniques demonstrated by high-efficiency second-harmonic generation in aluminum nitride (AlN) photonic microring resonators, highly compact and nanophotonic implementation of parametric oscillation is feasible. Here we employ phase-matched AlN microring resonators to demonstrate low-threshold parametric oscillation in the telecom infrared band with an on-chip efficiency up to 17% and milliwatt-level output power. A broad phase-matching window is observed, enabling tunable generation of signal and idler pairs over a 180 nm bandwidth across the C band. This result establishes an important milestone in integrated nonlinear optics and paves the way towards chip-based quantum light sources and tunable, coherent radiation for spectroscopy and chemical sensing.