NbF5前驱体化学气相沉积铌涂层的生长动力学

Translated title of the contribution: Growth Kinetics of Niobium Coating Prepared by CVD from NbF5

Mingmin Zheng, Chengwen Tan, Xiaodong Yu*, Ying Li, Honglei Ma

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Material Science