Nanometer profile measurement of large aspheric optical surface with improved deflectometry method - Principle introduction and experimental verification

Muzheng Xiao*, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

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