Multi-axis integrated CMOS-MEMS inertial sensors

Huikai Xie; Hongzhi Sun; Kemiao Jia; Deyou Fang; Hongwei Qu

doi:10.1109/ICSICT.2010.5667618

Multi-axis integrated CMOS-MEMS inertial sensors

Huikai Xie^*, Hongzhi Sun, Kemiao Jia, Deyou Fang, Hongwei Qu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.

Original language	English
Title of host publication	ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Pages	1394-1395
Number of pages	2
DOIs	https://doi.org/10.1109/ICSICT.2010.5667618
Publication status	Published - 2010
Externally published	Yes
Event	2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China Duration: 1 Nov 2010 → 4 Nov 2010

Publication series

Name	ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference	2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
Country/Territory	China
City	Shanghai
Period	1/11/10 → 4/11/10

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10.1109/ICSICT.2010.5667618

Cite this

Xie, H., Sun, H., Jia, K., Fang, D., & Qu, H. (2010). Multi-axis integrated CMOS-MEMS inertial sensors. In ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings (pp. 1394-1395). Article 5667618 (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings). https://doi.org/10.1109/ICSICT.2010.5667618

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title = "Multi-axis integrated CMOS-MEMS inertial sensors",

abstract = "Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.",

author = "Huikai Xie and Hongzhi Sun and Kemiao Jia and Deyou Fang and Hongwei Qu",

year = "2010",

doi = "10.1109/ICSICT.2010.5667618",

language = "English",

isbn = "9781424457984",

series = "ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

pages = "1394--1395",

booktitle = "ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

note = "2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 01-11-2010 Through 04-11-2010",

}

Xie, H, Sun, H, Jia, K, Fang, D & Qu, H 2010, Multi-axis integrated CMOS-MEMS inertial sensors. in ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 5667618, ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings, pp. 1394-1395, 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, 1/11/10. https://doi.org/10.1109/ICSICT.2010.5667618

Multi-axis integrated CMOS-MEMS inertial sensors. / Xie, Huikai; Sun, Hongzhi; Jia, Kemiao et al.
ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings. 2010. p. 1394-1395 5667618 (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Multi-axis integrated CMOS-MEMS inertial sensors

AU - Xie, Huikai

AU - Sun, Hongzhi

AU - Jia, Kemiao

AU - Fang, Deyou

AU - Qu, Hongwei

PY - 2010

Y1 - 2010

N2 - Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.

AB - Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.

UR - http://www.scopus.com/inward/record.url?scp=78751489690&partnerID=8YFLogxK

U2 - 10.1109/ICSICT.2010.5667618

DO - 10.1109/ICSICT.2010.5667618

M3 - Conference contribution

AN - SCOPUS:78751489690

SN - 9781424457984

T3 - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

SP - 1394

EP - 1395

BT - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

T2 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology

Y2 - 1 November 2010 through 4 November 2010

ER -

Xie H, Sun H, Jia K, Fang D, Qu H. Multi-axis integrated CMOS-MEMS inertial sensors. In ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings. 2010. p. 1394-1395. 5667618. (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings). doi: 10.1109/ICSICT.2010.5667618

Multi-axis integrated CMOS-MEMS inertial sensors

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