Abstract
Metal/semiconductor Fex(In2O3)1-x granular films were prepared by the rf-sputtering. The microstructure was studied by using XRD, TEM and magnetic measurements. The results showed that the nanometer-sized Fe particles uniformly dispersed in the amorphous In2O3. Appropriate annealing leads to the crystallization of In2O3 films and the growth of the Fe particle size. As a result, the magnetic behavior of the films transits from superparamagnetic to ferromagnetic. The variation of the lattice constant for In2O3 depends on the volume fraction of Fe particles.
Original language | English |
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Pages (from-to) | 1095-1098 |
Number of pages | 4 |
Journal | Jinshu Xuebao/Acta Metallurgica Sinica |
Volume | 34 |
Issue number | 10 |
Publication status | Published - Oct 1998 |
Externally published | Yes |
Keywords
- Metallic granular film
- Microstructure
- Semiconductor
- Super-paramagnetism