Fingerprint
Dive into the research topics of 'Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications
Izhar, Xiaoyi Wang, Wei Xu, Yi Kuen Lee
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
2
Citations
(Scopus)