Method of calculating the inductance value of MEMS suspended inductors with silicon substrates

Yiyuan Li, Jianhua Li*, Lixin Xu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Method of calculating the inductance value of MEMS suspended inductors with silicon substrates'. Together they form a unique fingerprint.

Engineering