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MEMS patch antenna array with broadband and high-gain on double-layer silicon wafers
Liufeng Yang,
Ting Wang
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Corresponding author for this work
School of Mechatronical Engineering
Beijing Institute of Technology
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peer-review
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Engineering
Microelectromechanical System
100%
Antenna
100%
Antenna Arrays
100%
Silicon Wafer
100%
Patch Antenna
100%
Double Layer
100%
Microstrip Antenna
50%
Simulation Result
25%
Harmonics
25%
Dielectrics
25%
Silicon Substrate
25%
Ground Plane
25%
Defected Ground Structures
25%