MEMS法布里-珀罗滤波芯片及其光谱探测应用研究进展

Translated title of the contribution: Research Progresses of MEMS Fabry-Perot Filtering Chips and Their Applications for Spectral Detection

Kui Zhou, Zheng Shan, Qian Zhang, Xiejun Wang, Jian Zhou, Chenwei Deng, Yiting Yu*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

3 Citations (Scopus)

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Computer Science

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Physics

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Chemical Engineering