@inproceedings{12e71748930e4130868909ad3f70e63c,
title = "MANIPULATION OF OPTOELECTRONIC MICROMACHINES IN 3D",
abstract = "In this work, we reported the use of optoelectronic tweezers together with micromechanical structures fabricated by two-photon polymerization technique to create light-driven multi-component micromachines that can perform 3D multiplanar motion. A micro-gear rotating in the horizontal plane was used to drive a 'flipped-up' micro-gear and make it rotate in the vertical plane, thus achieving 3D multiplanar motion for the whole system. These results are unique to what has been demonstrated previously, expanding the capability of the optoelectronic micromachine system from 2D coplanar to 3D multiplanar motion with potential utility for microfluidics, microrobotics, MEMS and beyond.",
keywords = "Dielectrophoresis, Micromachine, Micromanipulation, Optoelectronic tweezers",
author = "Gong Li and Bingrui Xu and Xiaopu Wang and Wheeler, {Aaron R.} and Shuailong Zhang",
note = "Publisher Copyright: {\textcopyright} 2022 MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences. All rights reserved.; 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2022 ; Conference date: 23-10-2022 Through 27-10-2022",
year = "2022",
language = "English",
series = "MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Chemical and Biological Microsystems Society",
pages = "77--78",
booktitle = "MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
}