Low-Temperature Fabrication of Indium Oxynitride Thin-Film Transistors via Plasma-Assisted Solution Process

Xuyang Li, Bin Liu, Xianwen Liu, Guobin Sun, Haifeng Liang, Huan Liu, Qian Mi, Guangcai Yuan, Jianshe Xue, Zhinong Yu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Low-Temperature Fabrication of Indium Oxynitride Thin-Film Transistors via Plasma-Assisted Solution Process'. Together they form a unique fingerprint.

Engineering

Physics

Chemical Engineering

Material Science