@inproceedings{ee3b0746451a4b3f9a5c48a5441dde95,
title = "Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications",
abstract = "Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10°, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved.",
keywords = "Electrothermal actuation, Free-space optical communications, Large aperture, MEMS, Micromirror",
author = "Lei Wu and Huikai Xie",
year = "2009",
doi = "10.1109/OMEMS.2009.5338553",
language = "English",
isbn = "9781424423828",
series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",
pages = "131--132",
booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",
note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",
}