Kinematic analysis of in situ measurement during chemical mechanical planarization process

Hongkai Li, Tongqing Wang, Qian Zhao, Yonggang Meng, Xinchun Lu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Kinematic analysis of in situ measurement during chemical mechanical planarization process'. Together they form a unique fingerprint.

Material Science

Engineering