TY - JOUR
T1 - Investigation of the mechanical properties of thin films by nanoindentation, considering the effects of thickness and different coating-substrate combinations
AU - Chen, Shaohua
AU - Liu, Lei
AU - Wang, Tzuchiang
PY - 2005/2/1
Y1 - 2005/2/1
N2 - In order to further investigate nanoindentation data of film-substrate systems and to learn more about the mechanical properties of nanometer film-substrate systems, two kinds of films on different substrate systems have been tested with a systematic variation in film thickness and substrate characteristics. The two kinds of films are aluminum and tungsten, which have been sputtered on to glass and silicon substrates, respectively. Indentation experiments were performed with a Nano Indent XP II with indenter displacements typically about two times the nominal film thicknesses. The resulting data are analyzed in terms of load-displacement curves and various comparative parameters, such as hardness, Young's modulus, unloading stiffness and elastic recovery. Hardness and Young's modulus are investigated when the substrate effects are considered. The results show how the composite hardness and Young's modulus are different for different substrates, different films and different film thicknesses. An assumption of constant Young's modulus is used for the film-substrate system, in which the film and substrate have similar Young's moduli. Composite hardness obtained by the Joslin and Oliver method is compared with the directly measured hardness obtained by the Oliver and Pharr method.
AB - In order to further investigate nanoindentation data of film-substrate systems and to learn more about the mechanical properties of nanometer film-substrate systems, two kinds of films on different substrate systems have been tested with a systematic variation in film thickness and substrate characteristics. The two kinds of films are aluminum and tungsten, which have been sputtered on to glass and silicon substrates, respectively. Indentation experiments were performed with a Nano Indent XP II with indenter displacements typically about two times the nominal film thicknesses. The resulting data are analyzed in terms of load-displacement curves and various comparative parameters, such as hardness, Young's modulus, unloading stiffness and elastic recovery. Hardness and Young's modulus are investigated when the substrate effects are considered. The results show how the composite hardness and Young's modulus are different for different substrates, different films and different film thicknesses. An assumption of constant Young's modulus is used for the film-substrate system, in which the film and substrate have similar Young's moduli. Composite hardness obtained by the Joslin and Oliver method is compared with the directly measured hardness obtained by the Oliver and Pharr method.
KW - Coating and substrate
KW - Mechanical property
KW - Nanoindentation
UR - http://www.scopus.com/inward/record.url?scp=10244266382&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2004.03.037
DO - 10.1016/j.surfcoat.2004.03.037
M3 - Article
AN - SCOPUS:10244266382
SN - 0257-8972
VL - 191
SP - 25
EP - 32
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 1
ER -