@inproceedings{148f611448a049ffa1c0bc1004cfc54a,
title = "Infrared absorption modeling of VOx microbolometer",
abstract = "The absorption model plays an important role in the design of the microbolometer structure regarding the determination of the optimum thickness of the structure layers. Moreover, the infrared absorption depends on the wavelength of the radiation and the material properties. In this paper, we presented an Infrared absorption model with absorption coefficient of 96% at maximum absorption wavelength of 9.89μm which is very close to the expected value 10μm. This model was established by using MATLAB so that the simulation of the infrared absorption of the VOx microbolometer could be accomplished. In order to confirm the role of this modeling in the design of the device structure, comparison with other structures is also studied in this paper.",
keywords = "Absorption spectrum, Infrared (ir) absorption, Microbolometer, Vanadium oxide (vox)",
author = "Mehdi Aggoun and Jianliang Jiang and Khan, {M. Khalid}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, OIT 2015 ; Conference date: 17-05-2015 Through 19-05-2015",
year = "2015",
doi = "10.1117/12.2192816",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Zhongping Chen and Xuping Zhang and David Erickson and Xudong Fan",
booktitle = "2015 International Conference on Optical Instruments and Technology",
address = "United States",
}