Fingerprint
Dive into the research topics of 'Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Inductive eddy current sensing as a displacement sensing mechanism for large piston/rotation micromirrors
Victor Farm Guoo Tseng*, Lei Wu, Huikai Xie
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
7
Citations
(Scopus)