@inproceedings{f7107442b14149fea472b8c31ec8db6e,
title = "Improvement of thermal properties in epitaxial aluminum nitride pedestal microring",
abstract = "We report thermal properties improvement of aluminum nitride (AlN) microring resonator by adopting epitaxial material and pedestal structure. With optimized inductively coupled plasma (ICP) dry etching using Cl2/BCl3/Ar mixture, pedestal microring resonators have been fabricated on epitaxial AlN. Transmission measurement reveals a loaded quality factor of ∼1×104 at under-coupled condition, corresponding to a propagation loss of 27 dB/cm around 1.55 μm. Thermal effect induced resonant peak shift at different coupled powers is 6.3 pm/mW, and optical bistability can be observed at an input power above ∼115 mW.",
keywords = "Epitaxial AlN, ICP dry etching, pedestal microring, thermal properties",
author = "Xianwen Liu and Changzheng Sun and Bing Xiong and Zhibiao Hao and Yanjun Han and Jian Wang and Lai Wang and Yi Luo",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 14th International Conference on Optical Communications and Networks, ICOCN 2015 ; Conference date: 03-07-2015 Through 05-07-2015",
year = "2015",
month = aug,
day = "14",
doi = "10.1109/ICOCN.2015.7203683",
language = "English",
series = "ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "ICOCN 2015 - 14th International Conference on Optical Communications and Networks, Proceedings",
address = "United States",
}