Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method

Tianfeng Zhou; Benshuai Ruan; Qian Yu; Jia Zhou; Peng Liu; Wenxiang Zhao; Xibin Wang

doi:10.1007/s00170-021-07072-9

Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method

Tianfeng Zhou^*, Benshuai Ruan, Qian Yu, Jia Zhou, Peng Liu, Wenxiang Zhao, Xibin Wang

^*Corresponding author for this work

School of Mechanical Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Single-point diamond cutting is an efficient method to fabricate microlens arrays (MLAs). However, machining MLAs at the microscale with high dimensional accuracy and a smooth surface finish is a difficult task. In this study, a method of profile cutting is proposed to machine MLAs on electroless nickel–phosphorus (Ni–P) plating. To improve the dimensional accuracy of MLAs, a precision tool setting method is introduced, via which the precision of MLA sag can be controlled to within 20 nm. In addition, the formation mechanism of corrugation defects is studied via a finite element (FE) simulation of the wedge nano-cutting process and a cutting experiment of concentric ring grooves. By optimizing the tool settings and the machining parameters, high-quality MLAs with apertures of Φ100 μm can be created.

Original language	English
Pages (from-to)	1877-1888
Number of pages	12
Journal	International Journal of Advanced Manufacturing Technology
Volume	115
Issue number	5-6
DOIs	https://doi.org/10.1007/s00170-021-07072-9
Publication status	Published - Jul 2021

Keywords

Corrugation defect
Microlens array
Nickel–phosphorus plating
Precision tool setting
Profile cutting

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10.1007/s00170-021-07072-9

Cite this

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title = "Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method",

abstract = "Single-point diamond cutting is an efficient method to fabricate microlens arrays (MLAs). However, machining MLAs at the microscale with high dimensional accuracy and a smooth surface finish is a difficult task. In this study, a method of profile cutting is proposed to machine MLAs on electroless nickel–phosphorus (Ni–P) plating. To improve the dimensional accuracy of MLAs, a precision tool setting method is introduced, via which the precision of MLA sag can be controlled to within 20 nm. In addition, the formation mechanism of corrugation defects is studied via a finite element (FE) simulation of the wedge nano-cutting process and a cutting experiment of concentric ring grooves. By optimizing the tool settings and the machining parameters, high-quality MLAs with apertures of Φ100 μm can be created.",

keywords = "Corrugation defect, Microlens array, Nickel–phosphorus plating, Precision tool setting, Profile cutting",

author = "Tianfeng Zhou and Benshuai Ruan and Qian Yu and Jia Zhou and Peng Liu and Wenxiang Zhao and Xibin Wang",

note = "Publisher Copyright: {\textcopyright} 2021, The Author(s), under exclusive licence to Springer-Verlag London Ltd., part of Springer Nature.",

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T1 - Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method

AU - Zhou, Tianfeng

AU - Ruan, Benshuai

AU - Yu, Qian

AU - Zhou, Jia

AU - Liu, Peng

AU - Zhao, Wenxiang

AU - Wang, Xibin

PY - 2021/7

Y1 - 2021/7

N2 - Single-point diamond cutting is an efficient method to fabricate microlens arrays (MLAs). However, machining MLAs at the microscale with high dimensional accuracy and a smooth surface finish is a difficult task. In this study, a method of profile cutting is proposed to machine MLAs on electroless nickel–phosphorus (Ni–P) plating. To improve the dimensional accuracy of MLAs, a precision tool setting method is introduced, via which the precision of MLA sag can be controlled to within 20 nm. In addition, the formation mechanism of corrugation defects is studied via a finite element (FE) simulation of the wedge nano-cutting process and a cutting experiment of concentric ring grooves. By optimizing the tool settings and the machining parameters, high-quality MLAs with apertures of Φ100 μm can be created.

AB - Single-point diamond cutting is an efficient method to fabricate microlens arrays (MLAs). However, machining MLAs at the microscale with high dimensional accuracy and a smooth surface finish is a difficult task. In this study, a method of profile cutting is proposed to machine MLAs on electroless nickel–phosphorus (Ni–P) plating. To improve the dimensional accuracy of MLAs, a precision tool setting method is introduced, via which the precision of MLA sag can be controlled to within 20 nm. In addition, the formation mechanism of corrugation defects is studied via a finite element (FE) simulation of the wedge nano-cutting process and a cutting experiment of concentric ring grooves. By optimizing the tool settings and the machining parameters, high-quality MLAs with apertures of Φ100 μm can be created.

KW - Corrugation defect

KW - Microlens array

KW - Nickel–phosphorus plating

KW - Precision tool setting

KW - Profile cutting

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JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

IS - 5-6

ER -

Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method

Abstract

Keywords

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