High-performance humidity sensor constructed with vertically aligned graphene arrays on silicon Schottky junctions

Hang Wang; Menghan Zhao; Wei Zhu; Zhiduo Liu; Gang Wang; Shiwei Tang; Da Chen; Jong Min Lee; Siwei Yang; Guqiao Ding

doi:10.1016/j.matlet.2020.128343

High-performance humidity sensor constructed with vertically aligned graphene arrays on silicon Schottky junctions

Hang Wang, Menghan Zhao, Wei Zhu, Zhiduo Liu, Gang Wang^*, Shiwei Tang, Da Chen, Jong Min Lee, Siwei Yang, Guqiao Ding

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

Vertically aligned graphene arrays (VAGAs) are perpendicularly oriented and interconnected by arrangements with high aspect ratios and specific surface areas, promoting the gas molecule adsorption capacity and active surface sensitivity. By taking advantage of plasma-assisted chemical vapor deposition (PACVD), growth of VAGAs on silicon (Si) substrate has been demonstrated. As-grown VAGAs/Si has excellent Schottky junction-based humidity sensing characteristics with fast response and recovery time. Joule-heating dismisses physical absorbed vapor molecules from the vertical arrangement, realizing fully-reversible operation. The mechanism of humidity detection is explored by the scanning Kelvin probe microscopy (SKPM) and finite difference time domain (FDTD) simulation. Our study may promote the advancement of gas sensors.

Original language	English
Article number	128343
Journal	Materials Letters
Volume	277
DOIs	https://doi.org/10.1016/j.matlet.2020.128343
Publication status	Published - 15 Oct 2020
Externally published	Yes

Keywords

Carbon materials
Electrical properties
Humidity sensor
Mechanism

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10.1016/j.matlet.2020.128343

Cite this

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title = "High-performance humidity sensor constructed with vertically aligned graphene arrays on silicon Schottky junctions",

abstract = "Vertically aligned graphene arrays (VAGAs) are perpendicularly oriented and interconnected by arrangements with high aspect ratios and specific surface areas, promoting the gas molecule adsorption capacity and active surface sensitivity. By taking advantage of plasma-assisted chemical vapor deposition (PACVD), growth of VAGAs on silicon (Si) substrate has been demonstrated. As-grown VAGAs/Si has excellent Schottky junction-based humidity sensing characteristics with fast response and recovery time. Joule-heating dismisses physical absorbed vapor molecules from the vertical arrangement, realizing fully-reversible operation. The mechanism of humidity detection is explored by the scanning Kelvin probe microscopy (SKPM) and finite difference time domain (FDTD) simulation. Our study may promote the advancement of gas sensors.",

keywords = "Carbon materials, Electrical properties, Humidity sensor, Mechanism",

author = "Hang Wang and Menghan Zhao and Wei Zhu and Zhiduo Liu and Gang Wang and Shiwei Tang and Da Chen and Lee, {Jong Min} and Siwei Yang and Guqiao Ding",

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doi = "10.1016/j.matlet.2020.128343",

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T1 - High-performance humidity sensor constructed with vertically aligned graphene arrays on silicon Schottky junctions

AU - Wang, Hang

AU - Zhao, Menghan

AU - Zhu, Wei

AU - Liu, Zhiduo

AU - Wang, Gang

AU - Tang, Shiwei

AU - Chen, Da

AU - Lee, Jong Min

AU - Yang, Siwei

AU - Ding, Guqiao

PY - 2020/10/15

Y1 - 2020/10/15

N2 - Vertically aligned graphene arrays (VAGAs) are perpendicularly oriented and interconnected by arrangements with high aspect ratios and specific surface areas, promoting the gas molecule adsorption capacity and active surface sensitivity. By taking advantage of plasma-assisted chemical vapor deposition (PACVD), growth of VAGAs on silicon (Si) substrate has been demonstrated. As-grown VAGAs/Si has excellent Schottky junction-based humidity sensing characteristics with fast response and recovery time. Joule-heating dismisses physical absorbed vapor molecules from the vertical arrangement, realizing fully-reversible operation. The mechanism of humidity detection is explored by the scanning Kelvin probe microscopy (SKPM) and finite difference time domain (FDTD) simulation. Our study may promote the advancement of gas sensors.

AB - Vertically aligned graphene arrays (VAGAs) are perpendicularly oriented and interconnected by arrangements with high aspect ratios and specific surface areas, promoting the gas molecule adsorption capacity and active surface sensitivity. By taking advantage of plasma-assisted chemical vapor deposition (PACVD), growth of VAGAs on silicon (Si) substrate has been demonstrated. As-grown VAGAs/Si has excellent Schottky junction-based humidity sensing characteristics with fast response and recovery time. Joule-heating dismisses physical absorbed vapor molecules from the vertical arrangement, realizing fully-reversible operation. The mechanism of humidity detection is explored by the scanning Kelvin probe microscopy (SKPM) and finite difference time domain (FDTD) simulation. Our study may promote the advancement of gas sensors.

KW - Carbon materials

KW - Electrical properties

KW - Humidity sensor

KW - Mechanism

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DO - 10.1016/j.matlet.2020.128343

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VL - 277

JO - Materials Letters

JF - Materials Letters

M1 - 128343

ER -

High-performance humidity sensor constructed with vertically aligned graphene arrays on silicon Schottky junctions

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Keywords

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