Fracture mechanism of movable part in micro-electro-mechanical systems device based on empirical electron theory

Fu Fu Wang; Wen Zhong Lou; Yue Feng

doi:10.1049/mnl.2015.0309

Fracture mechanism of movable part in micro-electro-mechanical systems device based on empirical electron theory

Fu Fu Wang, Wen Zhong Lou, Yue Feng

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.

Original language	English
Pages (from-to)	29-33
Number of pages	5
Journal	Micro and Nano Letters
Volume	11
Issue number	1
DOIs	https://doi.org/10.1049/mnl.2015.0309
Publication status	Published - 1 Jan 2016

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abstract = "The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.",

author = "Wang, {Fu Fu} and Lou, {Wen Zhong} and Yue Feng",

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AU - Lou, Wen Zhong

AU - Feng, Yue

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N2 - The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.

AB - The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.

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Fracture mechanism of movable part in micro-electro-mechanical systems device based on empirical electron theory

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