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Dive into the research topics of 'Formation of SiO2 thin films through plasma- enhanced chemical vapor deposition using SiH4/Ar/N2O'. Together they form a unique fingerprint.- Sort by
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Jingjing Zhang, Jingquan Guo, Qiutong Zhao, Lihui Yu, Shujun Ye*, Hongxing Yin, Yeliang Wang
Research output: Contribution to journal › Article › peer-review