Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna

Hongda Lu; Xin Lv; Kai Zhou; Yong Liu

doi:10.1049/el.2014.0327

Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna

Hongda Lu, Xin Lv, Kai Zhou, Yong Liu

School of Integrated Circuits and Electronics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A terahertz (THz) waveguide-fed antipodal tapered slot antenna (ATSA) based on silicon micromachined technology is proposed. The ATSA is composed of an antipodal tapered slots structure and a WR2.2 feeding waveguide, monolithically fabricated by deep reactive- ion etching, and sputtering gold and gold-gold thermo-compression bonding. The input return loss is tested and shows a level below -15 dB within 480 to 500 GHz. The gaussicity of radiation patterns at the working band is calculated to be 90%. Through further experiment, at 492 GHz, the ATSA exhibits asymmetric beamwidths of 25.5° and 25° in the E- and H- planes, respectively, and sidelobes below -8 dB, along with a 14.6 dB gain, which agree well with the simulated results. The proposed THz waveguide-fed ATSA is suitable for use as a feeder of THz imaging and detection systems.

Original language	English
Pages (from-to)	615-617
Number of pages	3
Journal	Electronics Letters
Volume	50
Issue number	8
DOIs	https://doi.org/10.1049/el.2014.0327
Publication status	Published - 10 Apr 2014

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10.1049/el.2014.0327

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title = "Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna",

abstract = "A terahertz (THz) waveguide-fed antipodal tapered slot antenna (ATSA) based on silicon micromachined technology is proposed. The ATSA is composed of an antipodal tapered slots structure and a WR2.2 feeding waveguide, monolithically fabricated by deep reactive- ion etching, and sputtering gold and gold-gold thermo-compression bonding. The input return loss is tested and shows a level below -15 dB within 480 to 500 GHz. The gaussicity of radiation patterns at the working band is calculated to be 90%. Through further experiment, at 492 GHz, the ATSA exhibits asymmetric beamwidths of 25.5° and 25° in the E- and H- planes, respectively, and sidelobes below -8 dB, along with a 14.6 dB gain, which agree well with the simulated results. The proposed THz waveguide-fed ATSA is suitable for use as a feeder of THz imaging and detection systems.",

author = "Hongda Lu and Xin Lv and Kai Zhou and Yong Liu",

year = "2014",

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T1 - Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna

AU - Lu, Hongda

AU - Lv, Xin

AU - Zhou, Kai

AU - Liu, Yong

PY - 2014/4/10

Y1 - 2014/4/10

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AB - A terahertz (THz) waveguide-fed antipodal tapered slot antenna (ATSA) based on silicon micromachined technology is proposed. The ATSA is composed of an antipodal tapered slots structure and a WR2.2 feeding waveguide, monolithically fabricated by deep reactive- ion etching, and sputtering gold and gold-gold thermo-compression bonding. The input return loss is tested and shows a level below -15 dB within 480 to 500 GHz. The gaussicity of radiation patterns at the working band is calculated to be 90%. Through further experiment, at 492 GHz, the ATSA exhibits asymmetric beamwidths of 25.5° and 25° in the E- and H- planes, respectively, and sidelobes below -8 dB, along with a 14.6 dB gain, which agree well with the simulated results. The proposed THz waveguide-fed ATSA is suitable for use as a feeder of THz imaging and detection systems.

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Experimental realisation of micromachined terahertz waveguide-fed antipodal tapered slot antenna

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