Experimental and numerical investigation on GaN/Al₂O₃ laser lift-off technique

Engineering

• Energy Density 100%
• Sapphire Substrate 100%
• Surface Morphology 50%
• Transients 50%
• Temperature Field 50%
• Pulse Duration 50%
• Finite Element Method 50%
• Temperature Distribution 50%
• Temperature Region 50%
• Atomic Force Microscopy 50%
• Function of Time 50%
• Excimer Laser 50%

Material Science

• Film 100%
• Al2O3 100%
• Energy Density 33%
• Sapphire 33%
• Laser Pulse 33%
• Surface Morphology 16%
• Scanning Electron Microscopy 16%
• Photoluminescence 16%
• Finite Element Method 16%

Physics

• Excimer Laser 50%