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Enhancing piezoelectric response in (002)-Oriented TaxAl(1−x)N films by magnetron-sputtering composition-tunable AlTa alloys
Xueqian Yang, Jing Sun, Gongtian Chen, Hongcai Yu, Xiangping Zhang, Gang Tang, Wang Zhou, Yingguo Yang, Chao Ma, Jiawang Hong, Bin Yang*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)