Enabling Low-k Liner in Ultra-high Aspect Ratio TSVs by the Timing of Vacuum Treatment in the Vacuum-assisted Spin-coating Technique

Ziyue Zhang, Zhiming Chen*, Baoyan Yang, Yigang Hao, Yuwen Su, Yingtao Ding

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

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Engineering

Chemical Engineering