@inproceedings{65e97374507e4eaa933778ae040292f5,
title = "Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope",
abstract = "The electrostatic negative-stiffness behavior of vertical structures under out-of-plane motion decreases the resonant frequency and deteriorates the linearity of a lateral-axis tuning-fork gyroscope (TFG). An electrostatically isolated silicon island is proposed to suppress this behavior. The negative-stiffness behavior is observed and the effectiveness of the electrostatic isolation is experimentally verified. The nonlinearity of the TFG is reduced to 0.34% with a full range of 1,000°/s. This is a 5• improvement.",
author = "Guo, {Z. Y.} and Liu, {X. S.} and Yang, {Z. C.} and Zhao, {Q. C.} and Lin, {L. T.} and H. Xie and Yan, {G. Z.}",
year = "2010",
doi = "10.1109/MEMSYS.2010.5442514",
language = "English",
isbn = "9781424457649",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "264--267",
booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",
note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",
}